Issued Patents All Time
Showing 1–13 of 13 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8141426 | Displacement measurement apparatus for microstructure and displcement measurement method thereof | Hisashi Fujiwara, Masami Yakabe, Masato Hayashi | 2012-03-27 |
| 8082124 | Method and system for diagnosing abnormal plasma discharge | Takaya Miyano, Toshiyuki Matsumoto, Tsuyoshi Moriya | 2011-12-20 |
| 7726190 | Device, method and program for inspecting microstructure | Toshiyuki Matsumoto, Masami Yakabe, Keiichi Enjoji, Masato Hayashi | 2010-06-01 |
| 7428841 | Acceleration sensor and inclination-detecting method | Muneo Harada, Hiroyuki Hashimoto | 2008-09-30 |
| 7383732 | Device for inspecting micro structure, method for inspecting micro structure and program for inspecting micro structure | Katsuya Okumura, Toshiyuki Matsumoto, Masami Yakabe | 2008-06-10 |
| 7348788 | Probing card and inspection apparatus for microstructure | Masami Yakabe | 2008-03-25 |
| 7034551 | Electrostatic capacitance detection circuit and microphone device | Masami Yakabe | 2006-04-25 |
| 7023223 | Impedance measuring circuit and capacitance measuring circuit | Masami Yakabe, Toshiyuki Matsumoto, Koichi Nakano | 2006-04-04 |
| 7019540 | Electrostatic capacitance detection circuit and microphone device | Masami Yakabe | 2006-03-28 |
| 7005865 | Circuit and method for impedance detection | Masami Yakabe | 2006-02-28 |
| 6931928 | Microstructure with movable mass | Hiroyuki Hashimoto, Takahiko Ooasa, Muneo Harada | 2005-08-23 |
| 6438243 | Vibration wave detector | Muneo Harada, Shoichi Fukui, Takahiko Oasa, Shigeru Ando, Kenji Tanaka | 2002-08-20 |
| 6223601 | Vibration wave detecting method and vibration wave detector | Muneo Harada | 2001-05-01 |