Issued Patents All Time
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7726190 | Device, method and program for inspecting microstructure | Toshiyuki Matsumoto, Naoki Ikeuchi, Masami Yakabe, Masato Hayashi | 2010-06-01 |
| 7237606 | Wafer supporter | Mitsuhiro Yuasa, Koji Homma | 2007-07-03 |