Issued Patents All Time
Showing 101–105 of 105 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6423176 | Particle-removing apparatus for a semiconductor device manufacturing apparatus and method of removing particles | Natsuko Ito, Fumihiko Uesugi | 2002-07-23 |
| 6346425 | Vapor-phase processing method capable of eliminating particle formation | Natsuko Ito, Fumihiko Uesugi, Shuji Moriya, Masaru Aomori, Yoshinori Kato +1 more | 2002-02-12 |
| 6306770 | Method and apparatus for plasma etching | Natsuko Ito, Fumihiko Uesugi | 2001-10-23 |
| 6184489 | Particle-removing apparatus for a semiconductor device manufacturing apparatus and method of removing particles | Natsuko Ito, Fumihiko Uesugi | 2001-02-06 |
| 6115120 | System and method for detecting particles produced in a process chamber by scattering light | Fumihiko Uesugi, Natsuko Ito | 2000-09-05 |