KT

Katsuyuki Takahiro

TL Tokyo Electron Limited: 1 patents #3,538 of 5,567Top 65%
📍 Fuchu, JP: #592 of 926 inventorsTop 65%
Overall (All Time): #3,123,224 of 4,157,543Top 80%
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Showing 1–1 of 1 patents

Patent #TitleCo-InventorsDate
8821607 Particle capture unit, method for manufacturing the same, and substrate processing apparatus Tsuyoshi Moriya, Syunsuke Toyoizumi 2014-09-02