Issued Patents All Time
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8821607 | Particle capture unit, method for manufacturing the same, and substrate processing apparatus | Tsuyoshi Moriya, Syunsuke Toyoizumi | 2014-09-02 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8821607 | Particle capture unit, method for manufacturing the same, and substrate processing apparatus | Tsuyoshi Moriya, Syunsuke Toyoizumi | 2014-09-02 |