Issued Patents All Time
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12347676 | Substrate processing method and substrate processing system | Yuichiro WAGATSUMA, Masahisa Watanabe, Takashi Sakuma, Osamu Yokoyama, Kwangpyo Choi | 2025-07-01 |
| 11915964 | Substrate processing apparatus and stage | Yuichiro WAGATSUMA, Masahisa Watanabe | 2024-02-27 |