Issued Patents All Time
Showing 51–59 of 59 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6066558 | Multilevel interconnection forming method for forming a semiconductor device | Shigetoshi Hosaka, Yuichi Wada, Hiroshi Kobayashi, Tetsuya Yano | 2000-05-23 |
| 6063703 | Method for making metal interconnection | Hiroshi Shinriki, Takeshi Kaizuka, Nobuyuki Takeyasu, Tomohiro Ohta, Eiichi Kondoh +3 more | 2000-05-16 |
| 6045862 | CVD film forming method in which a film formation preventing gas is supplied in a direction from a rear surface of an object to be processed | Masami Mizukami, Takashi Mochizuki | 2000-04-04 |
| 6001736 | Method of manufacturing semiconductor device and an apparatus for manufacturing the same | Eiichi Kondo, Nobuyuki Takeyasu, Tomohiro Ohta, Takeshi Kaizuka, Shinpei Jinnouchi | 1999-12-14 |
| 5973402 | Metal interconnection and method for making | Hiroshi Shinriki, Takeshi Kaizuka, Nobuyuki Takeyasu, Tomohiro Ohta, Eiichi Kondoh +3 more | 1999-10-26 |
| 5952723 | Semiconductor device having a multilevel interconnection structure | Nobuyuki Takeyasu, Hiroshi Yamamoto, Eiichi Kondoh, Tomoharu Katagiri, Tomohiro Ohta | 1999-09-14 |
| 5904557 | Method for forming multilevel interconnection of semiconductor device | Takayuki Komiya | 1999-05-18 |
| 5637534 | Method of manufacturing semiconductor device having multilevel interconnection structure | Nobuyuki Takeyasu, Hiroshi Yamamoto, Eiichi Kondoh, Tomoharu Katagiri, Tomohiro Ohta | 1997-06-10 |
| 5627102 | Method for making metal interconnection with chlorine plasma etch | Hiroshi Shinriki, Takeshi Kaizuka, Nobuyuki Takeyasu, Tomohiro Ohta, Eiichi Kondoh +3 more | 1997-05-06 |