Issued Patents All Time
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6866890 | Method of forming a dielectric film | Shintaro Aoyama, Tsuyoshi Takahashi, Hiroshi Shinriki | 2005-03-15 |
| 6617207 | Method and system for forming a stacked gate insulating film | Shintaro Aoyama | 2003-09-09 |
| 6467491 | Processing apparatus and processing method | Masahito Sugiura, Hiroshi Shinriki, Shintaro Aoyama | 2002-10-22 |