Issued Patents All Time
Showing 26–48 of 48 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6485564 | Thin film forming method | Yijun Liu, Takashi Magara | 2002-11-26 |
| 6482266 | Metal organic chemical vapor deposition method and apparatus | Kenji Matsumoto | 2002-11-19 |
| 6467491 | Processing apparatus and processing method | Masahito Sugiura, Hideki Kiryu, Shintaro Aoyama | 2002-10-22 |
| 6428850 | Single-substrate-processing CVD method of forming film containing metal element | Yijun Liu, Masahito Sugiura | 2002-08-06 |
| 6232248 | Single-substrate-heat-processing method for performing reformation and crystallization | Masahito Sugiura | 2001-05-15 |
| 6143081 | Film forming apparatus and method, and film modifying apparatus and method | Masahito Sugiura | 2000-11-07 |
| 6126753 | Single-substrate-processing CVD apparatus and method | Yijun Liu, Masahito Sugiura | 2000-10-03 |
| 6063703 | Method for making metal interconnection | Takeshi Kaizuka, Nobuyuki Takeyasu, Tomohiro Ohta, Eiichi Kondoh, Hiroshi Yamamoto +3 more | 2000-05-16 |
| 6001729 | Method of forming wiring structure for semiconductor device | Takayuki Komiya, Hiroshi Yamamoto | 1999-12-14 |
| 5973402 | Metal interconnection and method for making | Takeshi Kaizuka, Nobuyuki Takeyasu, Tomohiro Ohta, Eiichi Kondoh, Hiroshi Yamamoto +3 more | 1999-10-26 |
| 5834846 | Semiconductor device with contact structure and method of manufacturing the same | Takayuki Komiya, Hiroshi Yamamoto | 1998-11-10 |
| 5679974 | Antifuse element and semiconductor device having antifuse elements | Yoshimitsu Tamura, Tomohiro Ohta | 1997-10-21 |
| 5652180 | Method of manufacturing semiconductor device with contact structure | Hiroshi Yamamoto, Nobuyuki Takeyasu, Takayuki Komiya, Tomohiro Ohta | 1997-07-29 |
| 5641985 | Antifuse element and semiconductor device having antifuse elements | Yoshimitsu Tamura, Tomohiro Ohta | 1997-06-24 |
| 5627102 | Method for making metal interconnection with chlorine plasma etch | Takeshi Kaizuka, Nobuyuki Takeyasu, Tomohiro Ohta, Eiichi Kondoh, Hiroshi Yamamoto +3 more | 1997-05-06 |
| 5565702 | Antifuse element, semiconductor device having antifuse elements, and method for manufacturing the same | Yoshimitsu Tamura, Tomohiro Ohta | 1996-10-15 |
| 5521423 | Dielectric structure for anti-fuse programming element | Takeshi Kaizuka, Tomohiro Ohta | 1996-05-28 |
| 5336638 | Process for manufacturing semiconductor devices | Masayuki Suzuki, Ryo Haruta, Masayuki Nakata | 1994-08-09 |
| 5292673 | Method of manufacturing a semiconductor device | Masayuki Nakata, Kiichiro Mukai | 1994-03-08 |
| 5079191 | Process for producing a semiconductor device | Yasushiro Nishioka, Noriyuki Sakuma, Kiichiro Mukai | 1992-01-07 |
| 4937650 | Semiconductor capacitor device with dual dielectric | Yasushiro Nishioka, Noriyuki Sakuma, Kiichiro Mukai | 1990-06-26 |
| 4891684 | Semiconductor device | Yasushiro Nishioka, Noriyuki Sakuma, Kiichiro Mukai | 1990-01-02 |
| 4809052 | Semiconductor memory device | Yasushiro Nishioka, Takeo Shiba, Kiichiro Mukai, Akihisa Uchida, Ichiro Mitamura +4 more | 1989-02-28 |