Issued Patents All Time
Showing 26–37 of 37 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7718544 | Method of forming silicon-containing insulation film having low dielectric constant and low diffusion coefficient | Kiyohiro Matsushita, Satoshi Takahashi, Nathan Kameling | 2010-05-18 |
| 7641761 | Apparatus and method for forming thin film using surface-treated shower plate | Yukihiro Mori, Tominori Yoshida, Masami Suzuki | 2010-01-05 |
| 7418921 | Plasma CVD apparatus for forming uniform film | Satoshi Takahashi | 2008-09-02 |
| 7147900 | Method for forming silicon-containing insulation film having low dielectric constant treated with electron beam radiation | Atsuki Fukazawa, Nobuo Matsuki, Shingo Ikeda | 2006-12-12 |
| 7098129 | Interlayer insulation film used for multilayer interconnect of semiconductor integrated circuit and method of manufacturing the same | Fumitoshi Ozaki, Satoshi Takahashi | 2006-08-29 |
| 7037855 | Method of forming fluorine-doped low-dielectric-constant insulating film | Yozo Ikedo, Ryu Nakano, Shuzo Hebiguchi | 2006-05-02 |
| 7012268 | Gas-shield electron-beam gun for thin-film curing application | Nobuo Matsuki, Atsuki Fukazawa | 2006-03-14 |
| 6935351 | Method of cleaning CVD device and cleaning device therefor | Koji Shibata, Hitoshi Murata, Etsuo Wani, Yoshihide Kosano | 2005-08-30 |
| 6905978 | Method of forming interlayer insulation film | Yukihiro Mori, Satoshi Takahashi, Ryo Kawaguchi | 2005-06-14 |
| 6818570 | Method of forming silicon-containing insulation film having low dielectric constant and high mechanical strength | Yukihiro Mori, Satoshi Takahashi, Kiyohiro Matsushita, Atsuki Fukazawa, Michael A. Todd | 2004-11-16 |
| 6740602 | Method of forming low-dielectric constant film on semiconductor substrate by plasma reaction using high-RF power | Menso Hendriks, Satoshi Takahashi | 2004-05-25 |
| 5626679 | Method and apparatus for preparing a silicon oxide film | Akio Shimizu | 1997-05-06 |