Issued Patents All Time
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7641761 | Apparatus and method for forming thin film using surface-treated shower plate | Naoto Tsuji, Yukihiro Mori, Masami Suzuki | 2010-01-05 |
| 6905981 | Low-k dielectric materials and processes | Michael A. Todd | 2005-06-14 |