Issued Patents All Time
Showing 26–37 of 37 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7467916 | Semiconductor-manufacturing apparatus equipped with cooling stage and semiconductor-manufacturing method using same | Takeshi Watanabe | 2008-12-23 |
| 7276123 | Semiconductor-processing apparatus provided with susceptor and placing block | Akira Shimizu, Hideaki Fukuda, Hiroki Arai, Baiei Kawano | 2007-10-02 |
| 7021881 | Semiconductor processing apparatus comprising chamber partitioned into reaction and transfer sections | Masaei Suwada, Takeshi Watanabe | 2006-04-04 |
| 6955741 | Semiconductor-processing reaction chamber | — | 2005-10-18 |
| 6945746 | Semiconductor manufacturing equipment and maintenance method | Takeshi Watanabe, Masaei Suwada | 2005-09-20 |
| 6899507 | Semiconductor processing apparatus comprising chamber partitioned into reaction and transfer sections | Masaei Suwada, Takeshi Watanabe | 2005-05-31 |
| 6860711 | Semiconductor-manufacturing device having buffer mechanism and method for buffering semiconductor wafers | — | 2005-03-01 |
| 6743329 | Sealing mechanism of multi-chamber load-locking device | Mitsusuke Kyogoku | 2004-06-01 |
| 6662817 | Gas-line system for semiconductor-manufacturing apparatus | Masaei Suwada | 2003-12-16 |
| 6630053 | Semiconductor processing module and apparatus | Masaei Suwada, Takeshi Watanabe | 2003-10-07 |
| 6454516 | Semiconductor substrate aligner apparatus and method | — | 2002-09-24 |
| 6305898 | Wafer transfer mechanism | Masaei Suwada, Kazunori Furukawara | 2001-10-23 |