Issued Patents All Time
Showing 1–8 of 8 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6743329 | Sealing mechanism of multi-chamber load-locking device | Takayuki Yamagishi | 2004-06-01 |
| 6053686 | Device and method for load locking for semiconductor processing | — | 2000-04-25 |
| 6024888 | Vapor selective etching method and apparatus | Hirohito Watanabe | 2000-02-15 |
| 5658417 | HF vapor selective etching method and apparatus | Hirohito Watanabe | 1997-08-19 |
| 5571330 | Load lock chamber for vertical type heat treatment apparatus | — | 1996-11-05 |
| 5509967 | Heat treatment apparatus | Osamu Honma | 1996-04-23 |
| 5484483 | Thermal treatment apparatus | — | 1996-01-16 |
| 4596934 | Electron beam apparatus with improved specimen holder | Takashi Yanaka, Kazuo Ohsawa | 1986-06-24 |