Issued Patents All Time
Showing 1–6 of 6 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9666799 | Concave word line and convex interlayer dielectric for protecting a read/write layer | Cheng Feng, Michiaki Sano, Akira Nakada, Steven J. Radigan, Eiji Hayashi | 2017-05-30 |
| 9620712 | Concave word line and convex interlayer dielectric for protecting a read/write layer | Eiji Hayashi, Michiaki Sano, Akira Nakada | 2017-04-11 |
| 9401309 | Multiheight contact via structures for a multilevel interconnect structure | Keisuke Izumi, Michiaki Sano, Takehiro Yamazaki, Hiroaki Iuchi, Akio Yanai +2 more | 2016-07-26 |
| 9368601 | Method for forming oxide below control gate in vertical channel thin film transistor | Michiaki Sano, Kensuke Yamaguchi, Akira Nakada | 2016-06-14 |
| 9177964 | Methods of forming sidewall gates | Akira Nakada, Michiaki Sano, Teruyuki Mine | 2015-11-03 |
| 8609549 | Plasma etching method, plasma etching apparatus, and computer-readable storage medium | Sungtae Lee, Masahiro Ogasawara, Junichi Sasaki | 2013-12-17 |