Issued Patents All Time
Showing 26–30 of 30 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 5494522 | Plasma process system and method | Shuji Moriya, Jun Yashiro, Yoshifumi Tahara, Satoru Kawakami, Susumu Tanaka | 1996-02-27 |
| 5449977 | Apparatus and method for generating plasma of uniform flux density | Satoshi Nakagawa, Yoshifumi Tahara | 1995-09-12 |
| 5411624 | Magnetron plasma processing apparatus | Yoshihisa Hirano, Yoshifumi Takara | 1995-05-02 |
| 5356515 | Dry etching method | Yoshifumi Tahara, Yoshihisa Hirano, Isahiro Hasegawa, Keiji Horioka, Takaya Matsushita | 1994-10-18 |
| 4558510 | Method of producing a semiconductor device | Keizo Tani | 1985-12-17 |