YT

Yoshifumi Takara

TL Tokyo Electron Limited: 1 patents #3,538 of 5,567Top 65%
Overall (All Time): #3,769,754 of 4,157,543Top 95%
1
Patents All Time

Issued Patents All Time

Showing 1–1 of 1 patents

Patent #TitleCo-InventorsDate
5411624 Magnetron plasma processing apparatus Yoshihisa Hirano, Masahiro Ogasawara 1995-05-02