Issued Patents All Time
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11404279 | Etching method and substrate processing apparatus | Takahiro Ohori, Masahiro Ogasawara | 2022-08-02 |
| 7633153 | Semiconductor module | Kazuo Shimokawa, Takashi Koyanagawa, Masako Ooishi, Tatsuya Yamada, Osamu Usuda +13 more | 2009-12-15 |
| 7514783 | Semiconductor module | Kazuo Shimokawa, Takashi Koyanagawa, Masako Ooishi, Tatsuya Yamada, Osamu Usuda +13 more | 2009-04-07 |