Issued Patents All Time
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6553277 | Method and apparatus for vacuum treatment | Shoji Yagisawa, Hiroshi Nishikawa, Takashi Ito | 2003-04-22 |
| 5785877 | Dry etching method | Masaaki Sato, Yoshinobu Arita, Masahiro Ogasawara, Hidenori Satoh | 1998-07-28 |
| 5556500 | Plasma etching apparatus | Makoto Hasegawa, Hiromi Sakima, Yoshio Ishikawa, Yasuo Imamura, Makoto Aoki | 1996-09-17 |