Issued Patents All Time
Showing 1–11 of 11 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 5785877 | Dry etching method | Masaaki Sato, Masahiro Ogasawara, Hidenori Satoh, Hiromitsu Kanbara | 1998-07-28 |
| 5723383 | Semiconductor substrate treatment method | Toshihiko Kosugi, Hiromu Ishii | 1998-03-03 |
| 5462014 | Apparatus for growing a thin metallic film | Nobuyoshi Awaya | 1995-10-31 |
| 5316796 | Process for growing a thin metallic film | Nobuyoshi Awaya | 1994-05-31 |
| 5104694 | Selective chemical vapor deposition of a metallic film on the silicon surface | Kunio Saito, Takao Amazawa | 1992-04-14 |
| 5080927 | Tin thin film formation method | Koichi Ikeda, Masahiko Maeda | 1992-01-14 |
| 5019531 | Process for selectively growing thin metallic film of copper or gold | Nobuyoshi Awaya | 1991-05-28 |
| 4963242 | Plasma etching apparatus | Masaaki Sato | 1990-10-16 |
| 4920401 | Bipolar transistors | Tetsushi Sakai, Yoshizi Kobayasi, Hironori Yamauchi | 1990-04-24 |
| 4660068 | Substrate structure of semiconductor device and method of manufacturing the same | Kazuhito Sakuma, Masaaki Sato, Nobuyoshi Awaya | 1987-04-21 |
| 4531282 | Bipolar transistors having vertically arrayed collector-base-emitter with novel polycrystalline base electrode surrounding island emitter and method of making same | Tetsushi Sakai, Yoshizi Kobayasi, Hironori Yamauchi | 1985-07-30 |