Issued Patents All Time
Showing 1–16 of 16 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8634121 | Mirror device, mirror array, optical switch, mirror device manufacturing method, and mirror substrate manufacturing method | Fusao Shimokawa, Shingo Uchiyama, Johji Yamaguchi, Makoto Sato, Kunihiko Sasakura +4 more | 2014-01-21 |
| 8582189 | Mirror device, mirror array, optical switch, mirror device manufacturing method, and mirror substrate manufacturing method | Fusao Shimokawa, Shingo Uchiyama, Johji Yamaguchi, Makoto Sato, Kunihiko Sasakura +4 more | 2013-11-12 |
| 8462410 | Mirror device, mirror array, optical switch, mirror device manufacturing method, and mirror substrate manufacturing method | Fusao Shimokawa, Shingo Uchiyama, Johji Yamaguchi, Makoto Sato, Kunihiko Sasakura +4 more | 2013-06-11 |
| 8149489 | Mirror device, mirror array, optical switch, mirror device manufacturing method, and mirror substrate manufacturing method | Fusao Shimokawa, Shingo Uchiyama, Johji Yamaguchi, Makoto Sato, Kunihiko Sasakura +4 more | 2012-04-03 |
| 7978388 | Mirror device and mirror device manufacturing method incorporating a collision preventive structure | Shingo Uchiyama, Fusao Shimokawa, Johji Yamaguchi, Kunihiko Sasakura | 2011-07-12 |
| 7482196 | Method of manufacturing a semiconductor device having MEMS | Masami Urano, Toshishige Shimamura, Yasuyuki Tanabe, Katsuyuki Machida, Tomomi Sakata | 2009-01-27 |
| 7360293 | Method of manufacturing recognition sensor | Norio Sato, Katsuyuki Machida, Hakaru Kyuragi, Satoshi Shigematsu, Hiroki Morimura +1 more | 2008-04-22 |
| 7208809 | Semiconductor device having MEMS | Masami Urano, Toshishige Shimamura, Yasuyuki Tanabe, Katsuyuki Machida, Tomomi Sakata | 2007-04-24 |
| 7189625 | Micromachine and manufacturing method | Yasuyuki Tanabe, Katsuyuki Machida, Masami Urano, Shouji Yagi, Tomomi Sakata | 2007-03-13 |
| 7123026 | Surface shape recognition sensor and method of manufacturing the same | Norio Sato, Katsuyuki Machida, Hakaru Kyuragi, Satoshi Shigematsu, Hiroki Morimura +1 more | 2006-10-17 |
| 6912336 | Optical switch device | Yasuyuki Tanabe, Katsuyuki Machida, Masami Urano, Toshishige Shimamura, Yuji Uenishi +1 more | 2005-06-28 |
| 6844744 | Surface shape recognition sensor and method of manufacturing the same | Shouji Yagi, Katsuyuki Machida, Hakaru Kyuragi | 2005-01-18 |
| 6743653 | Micromachine manufacturing method | Yasuyuki Tanabe, Katsuyuki Machida, Shouji Yagi | 2004-06-01 |
| 6468895 | Pattern forming method | Shouji Yagi, Katsuyuki Machida, Kunio Saito, Tadao Nagatsuma, Hakaru Kyuragi | 2002-10-22 |
| 6148303 | Regression tree generation method and apparatus therefor | Yasuhiko MORIMOTO, Shinichi Morishita | 2000-11-14 |
| 5723383 | Semiconductor substrate treatment method | Toshihiko Kosugi, Yoshinobu Arita | 1998-03-03 |