Issued Patents All Time
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 5104694 | Selective chemical vapor deposition of a metallic film on the silicon surface | Kunio Saito, Yoshinobu Arita | 1992-04-14 |
| 4956204 | Process of forming a film by low pressure chemical vapor deposition | Hiroaki Nakamura | 1990-09-11 |
| 4816126 | Method for forming a planarized thin film | Kazuyoshi Kamoshida, Hiroaki Nakamura | 1989-03-28 |
| 4770948 | High-purity metal and metal silicide target for LSI electrodes | Hideo Oikawa, Nakahachiro Honna, Hideo Miyazaki, Iwao Kyono, Nobuyuki Mori +2 more | 1988-09-13 |
| 4619695 | Process for producing high-purity metal targets for LSI electrodes | Hideo Oikawa, Nakahachiro Honma, Hideo Miyazaki, Iwao Kyono, Nobuyuki Mori +2 more | 1986-10-28 |