Issued Patents All Time
Showing 26–32 of 32 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6950297 | Electrostatic chuck and manufacturing method therefor | — | 2005-09-27 |
| 6872908 | Susceptor with built-in electrode and manufacturing method therefor | Takeshi Ootsuka, Kazunori Endou | 2005-03-29 |
| 6838646 | Susceptor device | Hiroshi Inazumachi | 2005-01-04 |
| 6768079 | Susceptor with built-in plasma generation electrode and manufacturing method therefor | — | 2004-07-27 |
| 6730276 | Plastic film electrostatic adsorption apparatus and electrostatic adsorption method | Kazunori Ishimura, Teruyasu Fujita | 2004-05-04 |
| 6603651 | Electrostatic chuck | — | 2003-08-05 |
| 6556414 | Electrostatic and vacuum chucking holding apparatus | — | 2003-04-29 |