Issued Patents All Time
Showing 1–9 of 9 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12014930 | Etching method and plasma processing apparatus | Mitsuhiro Iwano | 2024-06-18 |
| 11955342 | Method of etching and apparatus for plasma processing | Tangkuei WANG | 2024-04-09 |
| 11710643 | Method of etching and plasma processing apparatus | Mitsuhiro Iwano | 2023-07-25 |
| 11710644 | Etching method and plasma processing apparatus | Takahiro Yokoyama, Taihei MATSUHASHI, Hiroie Matsumoto | 2023-07-25 |
| 10957515 | Plasma processing method and plasma processing apparatus | Soichiro Kimura, Shinya Morikita | 2021-03-23 |
| 10734205 | Cleaning method and plasma processing apparatus | Mitsuhiro Iwano | 2020-08-04 |
| 10529583 | Etching method | Mitsuhiro Iwano | 2020-01-07 |
| 8569178 | Plasma processing method and plasma processing apparatus | Masahiro Ito, Ryoichi Yoshida | 2013-10-29 |
| 5038659 | Musical score block copy forming apparatus | Kohya Satoh, Haruo Mutoh | 1991-08-13 |