Issued Patents All Time
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12014930 | Etching method and plasma processing apparatus | Masanori Hosoya | 2024-06-18 |
| 11710643 | Method of etching and plasma processing apparatus | Masanori Hosoya | 2023-07-25 |
| 10734205 | Cleaning method and plasma processing apparatus | Masanori Hosoya | 2020-08-04 |
| 10529583 | Etching method | Masanori Hosoya | 2020-01-07 |