Issued Patents All Time
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11920928 | System and method for correcting optical path length measurement errors | Kenji Nagai | 2024-03-05 |
| 11710614 | Light interference system and substrate processing apparatus | Kenji Nagai, Satoshi Suzuki | 2023-07-25 |
| 11264267 | Apparatus for processing substrate and method for detecting a presence of a focus ring on a stage | Takaharu MIYADATE, Takashi Taira, Kenji Nagai | 2022-03-01 |