Issued Patents All Time
Showing 26–50 of 53 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9202675 | Plasma processing apparatus and electrode for same | Daisuke Hayashi | 2015-12-01 |
| 9038566 | Capacitive coupling plasma processing apparatus | Tatsuo Matsudo | 2015-05-26 |
| 8895454 | Etching method of multilayer film | Etsuji Ito, Akihiro Yokota, Shu Kusano, Hiroaki Ishizuka, Kazuya Nagaseki | 2014-11-25 |
| 8888951 | Plasma processing apparatus and electrode for same | — | 2014-11-18 |
| 8821684 | Substrate plasma processing apparatus and plasma processing method | Akio Ui, Naoki Tamaoki, Takashi Ichikawa, Hisataka Hayashi, Takeshi Kaminatsui +3 more | 2014-09-02 |
| 8741098 | Table for use in plasma processing system and plasma processing system | Akira Koshiishi, Shoichiro Matsuyama | 2014-06-03 |
| 8703002 | Plasma processing apparatus, plasma processing method and storage medium | Tatsuo Matsudo, Noriaki Imai, Takeshi Ohse, Jun Abe, Takayuki Katsunuma | 2014-04-22 |
| 8651049 | Plasma processing apparatus | Tatsuo Matsudo | 2014-02-18 |
| 8568606 | Substrate processing apparatus and substrate processing method using same | Takeshi Ohse, Jun Abe, Norikazu Yamada | 2013-10-29 |
| 8512511 | Mounting table and plasma processing apparatus | Yasuharu Sasaki | 2013-08-20 |
| 8293068 | Plasma processing apparatus | Chishio Koshimizu | 2012-10-23 |
| 8284538 | Electrostatic chuck device | Shoichiro Matsuyama, Atsushi Matsuura, Hiroshi Inazumachi, Mamoru Kosakai, Yukio Miura +1 more | 2012-10-09 |
| 8178444 | Substrate processing method and substrate processing apparatus | Chishio Koshimizu, Taichi Hirano, Masanobu Honda | 2012-05-15 |
| 8114247 | Plasma processing apparatus and focus ring | Shosuke Endoh | 2012-02-14 |
| 8070911 | Capacitive coupling plasma processing apparatus | Tatsuo Matsudo | 2011-12-06 |
| 7922862 | Plasma processing apparatus, electrode plate for plasma processing apparatus, and electrode plate manufacturing method | Katsuya Okumura, Kazuya Nagaseki, Hiroki Matsumaru, Shoichiro Matsuyama, Toshiki Takahashi | 2011-04-12 |
| 7850174 | Plasma processing apparatus and focus ring | Shosuke Endoh | 2010-12-14 |
| 7767055 | Capacitive coupling plasma processing apparatus | Noriaki Imai, Katsumi Horiguchi, Takaaki Nezu, Shoichiro Matsuyama, Hiroki Matsumaru +5 more | 2010-08-03 |
| 7622017 | Processing apparatus and gas discharge suppressing member | Shosuke Endoh, Kazuya Nagaseki, Tomoya Kubota, Daisuke Hayashi | 2009-11-24 |
| 7619870 | Electrostatic chuck | Shoichiro Matsuyama, Atsushi Matsuura, Hiroshi Inazumachi, Mamoru Kosakai, Yukio Miura +1 more | 2009-11-17 |
| 7585386 | Plasma processing apparatus, electrode plate for plasma processing apparatus, and electrode plate manufacturing method | Katsuya Okumura, Kazuya Nagaseki, Hiroki Matsumaru, Shoichiro Matsuyama, Toshiki Takahashi | 2009-09-08 |
| 7230202 | Plasma processing apparatus, electrode unit, feeder member and radio frequency feeder rod | Daisuke Hayashi, Kazuya Nagaseki, Atsushi Matsuura, Ryo Nonaka | 2007-06-12 |
| 7186315 | Plasma treatment apparatus | Itsuko Sakai | 2007-03-06 |
| 7112926 | Matching unit and plasma processing system | Mitsuhiro Yuasa, Kazuyoshi Watanabe, Jun'ichi Shimada | 2006-09-26 |
| 7104217 | Plasma processing apparatus | Toshiki Takahashi, Takumi Komatsu | 2006-09-12 |