Issued Patents All Time
Showing 51–53 of 53 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6733624 | Apparatus for holding an object to be processed | Akira Koshiishi | 2004-05-11 |
| 5888907 | Plasma processing method | Masayuki Tomoyasu | 1999-03-30 |
| 5514425 | Method of forming a thin film | Hitoshi Ito, Kyoichi Suguro, Nobuo Hayasaka, Haruo Okano, Kazuya Nagaseki +1 more | 1996-05-07 |