Issued Patents All Time
Showing 51–70 of 70 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7338576 | Plasma processing device | Hiroo Ono, Koichi Tateshita, Masanobu Honda, Daisuke Hayashi | 2008-03-04 |
| 7230202 | Plasma processing apparatus, electrode unit, feeder member and radio frequency feeder rod | Daisuke Hayashi, Shinji Himori, Atsushi Matsuura, Ryo Nonaka | 2007-06-12 |
| 7141178 | Plasma etching method | Takanori Mimura, Hiroki Miyajima | 2006-11-28 |
| 7109123 | Silicon etching method | Takanori Mimura, Kenji Yamamoto, Katsumi Horiguchi, Yahui Huang | 2006-09-19 |
| 7084005 | Semiconductor device and method of manufacturing the same | Katsuya Okumura, Koji Maruyama, Akiteru Rai | 2006-08-01 |
| 7023002 | Surface treating device and surface treating method | Tadashi Onishi, Koichi Murakami, Daisuke Hayashi, Akiko Kamigori, Minoru Honda | 2006-04-04 |
| 7022616 | High speed silicon etching method | Takanori Mimura, Itsuko Sakai, Tokuhisa Ohiwa | 2006-04-04 |
| 6793832 | Plasma etching method | Takeshi Saito | 2004-09-21 |
| 6544380 | Plasma treatment method and apparatus | Masayuki Tomoyasu, Akira Koshiishi, Kosuke Imafuku, Shosuke Endo, Kazuhiro Tahara +6 more | 2003-04-08 |
| 6391147 | Plasma treatment method and apparatus | Kosuke Imafuku, Shosuke Endo, Kazuhiro Tahara, Yukio Naito, Keizo Hirose | 2002-05-21 |
| 6365060 | Method for controlling plasma processor | Hiroki Yamazaki | 2002-04-02 |
| 6264788 | Plasma treatment method and apparatus | Masayuki Tomoyasu, Akira Koshiishi, Kosuke Imafuku, Shosuke Endo, Kazuhiro Tahara +6 more | 2001-07-24 |
| 6106737 | Plasma treatment method utilizing an amplitude-modulated high frequency power | Masayuki Tomoyasu, Akira Koshiishi, Kosuke Imafuku, Shosuke Endo, Kazuhiro Tahara +6 more | 2000-08-22 |
| 6074518 | Plasma processing apparatus | Kosuke Imafuku, Shosuke Endo, Kazuhiro Tahara, Hiroshi Tsuchiya, Masayuki Tomoyasu +6 more | 2000-06-13 |
| 5942075 | Plasma processing apparatus | Kazunori Nagahata | 1999-08-24 |
| 5919332 | Plasma processing apparatus | Akira Koshiishi, Masahiro Ogasawara, Keizo Hirose, Riki Tomoyoshi, Makoto Aoki | 1999-07-06 |
| 5698062 | Plasma treatment apparatus and method | Takao Sakamoto, Kazuhiro Tahara, Kenji Momose, Kosuke Imafuku, Shosuke Endo +2 more | 1997-12-16 |
| 5539274 | Electron beam excited plasma system | Youichi Araki, Shuji Mochizuki | 1996-07-23 |
| 5514425 | Method of forming a thin film | Hitoshi Ito, Kyoichi Suguro, Nobuo Hayasaka, Haruo Okano, Shinji Himori +1 more | 1996-05-07 |
| 5368676 | Plasma processing apparatus comprising electron supply chamber and high frequency electric field generation means | Shuuji Mochizuki | 1994-11-29 |