Issued Patents All Time
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 5397956 | Electron beam excited plasma system | Yoh-ichi Araki | 1995-03-14 |
| 5368676 | Plasma processing apparatus comprising electron supply chamber and high frequency electric field generation means | Kazuya Nagaseki | 1994-11-29 |