Issued Patents All Time
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11393662 | Apparatuses and methods for plasma processing | Zhiying Chen, Megan Carruth, Peter Ventzek, Alok Ranjan, Kazuya Nagaseki | 2022-07-19 |
| 11264212 | Ion angle detector | Zhiying Chen, Megan Carruth, Peter Ventzek, Alok Ranjan | 2022-03-01 |
| 11152194 | Plasma processing apparatuses having a dielectric injector | Zhiying Chen, Peter Ventzek, Alok Ranjan, Kazuya Nagaseki | 2021-10-19 |