Issued Patents All Time
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8590861 | Gate valve and substrate processing apparatus equipped with the same | Tsutomu Hiroki, Masaaki Nose, Takehiro Nishiba | 2013-11-26 |
| 6040120 | Thermal processing apparatus | Hideyuki Taniguchi | 2000-03-21 |