Issued Patents All Time
Showing 26–42 of 42 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7857569 | Semiconductor processing system | Hiroaki Saeki | 2010-12-28 |
| 7837425 | Transportation apparatus and drive mechanism | Hiroaki Saeki, Shigeru Ishizawa, Takehiro Shindo, Wataru Machiyama | 2010-11-23 |
| 7780391 | Substrate processing device | Takaaki Matsuoka, Katsuhiko Iwabuchi, Shigeru Ishizawa | 2010-08-24 |
| 7762425 | Vacuum container apparatus used for manufacturing semiconductor devices and lid apparatus for same | Toru Kimura, Hiroshi Narushima | 2010-07-27 |
| 7706907 | Substrate processing apparatus, substrate processing method, computer program, and storage medium | — | 2010-04-27 |
| 7637477 | Gate valve apparatus of vacuum processing system | — | 2009-12-29 |
| 7622008 | Gate valve and vacuum container for semiconductor processing system | — | 2009-11-24 |
| 7572742 | Equipment and method for processing semiconductor | — | 2009-08-11 |
| 7398692 | Sealing ring and its managing system | Masayuki Noguchi, Shinya Sakurai | 2008-07-15 |
| D562524 | Wafer transfer apparatus | Wataru Machiyama, Takehiro Shindo | 2008-02-19 |
| 7286890 | Transfer apparatus for target object | Wataru Machiyama, Shigeru Ishizawa, Hiroshi Koizumi, Keisuke Kondoh | 2007-10-23 |
| 7281700 | Gate valve apparatus for vacuum processing system | — | 2007-10-16 |
| 6709521 | Transfer apparatus and accommodating apparatus for semiconductor process, and semiconductor processing system | — | 2004-03-23 |
| 6681916 | Transfer system for conveying LCD glass substrate | — | 2004-01-27 |
| 6331095 | Transportation system and processing apparatus employing the transportation system | — | 2001-12-18 |
| 5989346 | Semiconductor processing apparatus | — | 1999-11-23 |
| 5374147 | Transfer device for transferring a substrate | Teruo Asakawa | 1994-12-20 |