Issued Patents All Time
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6711454 | System and method for scheduling the movement of wafers in a wafer-processing tool | Tatsuya Ogi | 2004-03-23 |
| 6535784 | System and method for scheduling the movement of wafers in a wafer-processing tool | Tatsuya Ogi | 2003-03-18 |