Issued Patents All Time
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11569112 | Substrate processing apparatus and method of opening/closing lid of substrate accommodating vessel | Hiroyuki Takatsuka, Tatsuya Mukoyama | 2023-01-31 |
| 9002494 | Substrate transfer method and storage medium | Tatsuya Ogi | 2015-04-07 |