Issued Patents All Time
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12387955 | Substrate processing apparatus and substrate processing method | Tatsuya Mukoyama, Kazunori Kazama, Shigeru Kubota, Sho Ichinose, Junya Chizuwa +2 more | 2025-08-12 |
| 8280852 | System, method and storage medium for controlling a processing system | Hiroshi Nakamura, Shouichi Otake | 2012-10-02 |