Issued Patents All Time
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8790529 | Gas supply system, substrate processing apparatus and gas supply method | Shinichiro Hayasaka, Ken Horiuchi, Takeshi Yokouchi | 2014-07-29 |
| 8190281 | Substrate processing apparatus, method for examining substrate processing conditions, and storage medium | Takeshi Yokouchi | 2012-05-29 |
| 7896967 | Gas supply system, substrate processing apparatus and gas supply method | Shinichiro Hayasaka, Ken Horiuchi, Takeshi Yokouchi | 2011-03-01 |
| 7535688 | Method for electrically discharging substrate, substrate processing apparatus and program | Takeshi Yokouchi | 2009-05-19 |