Issued Patents All Time
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10871786 | Substrate processing system and method of determining flow rate of gas | Risako Miyoshi, Norihiko Amikura, Kazuyuki Miura, Yasuhiro SHOJI | 2020-12-22 |
| 9946948 | Article delivery system | Mihoko Okada, Shinichi Tsukahara, Marie Kuwahara, Junko Noda | 2018-04-17 |