Issued Patents All Time
Showing 26–47 of 47 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10871786 | Substrate processing system and method of determining flow rate of gas | Risako Miyoshi, Kazuyuki Miura, Hiroshi Yazaki, Yasuhiro SHOJI | 2020-12-22 |
| 10859426 | Method of inspecting flow rate measuring system | Jun Hirose, Risako Miyoshi, Shinobu Onodera | 2020-12-08 |
| 10845119 | Method of arranging treatment process | Jun Hirose, Risako Miyoshi | 2020-11-24 |
| 10788356 | Method of inspecting gas supply system, method of calibrating flow controller, and method of calibrating secondary reference device | Risako Miyoshi | 2020-09-29 |
| 10665430 | Gas supply system, substrate processing system and gas supply method | Atsushi Sawachi, Kouji Nishino, Yohei Sawada, Yoshiharu Kishida | 2020-05-26 |
| 10533916 | Method for inspecting for leaks in gas supply system valves | Atsushi Sawachi | 2020-01-14 |
| 10424466 | Method for inspecting shower plate of plasma processing apparatus | Risako Miyoshi | 2019-09-24 |
| 10274972 | Method of inspecting gas supply system | Risako Miyoshi | 2019-04-30 |
| 10229844 | Gas supply system, gas supply control method and gas replacement method | Atsushi Sawachi, Yoshiyasu Sato | 2019-03-12 |
| 10168049 | Method for preventing explosion of exhaust gas in decompression processing apparatus | Norikazu Sasaki, Risako Miyoshi | 2019-01-01 |
| 10031007 | Method of calculating output flow rate of flow rate controller | Risako Miyoshi | 2018-07-24 |
| 9904299 | Gas supply control method | Kumiko Ono, Hiroshi Tsujimoto, Atsushi Sawachi, Norikazu Sasaki, Yoshitaka Kawaguchi | 2018-02-27 |
| 9835195 | Bolt-locking apparatus, mounting method thereof and mounting jig | Satoshi Kagatsume, Masahiko Satoh, Yukio Naito, Satoshi Muto, Tomohiro Nakata +2 more | 2017-12-05 |
| 9494180 | Bolt-locking apparatus, mounting method thereof and mounting jig | Satoshi Kagatsume, Masahiko Satoh, Yukio Naito, Satoshi Muto, Tomohiro Nakata +2 more | 2016-11-15 |
| 9240307 | Plasma processing apparatus | Risako Miyoshi | 2016-01-19 |
| 9236230 | Plasma processing apparatus and gas supply method therefor | Yoshiyuki Kato, Risako Miyoshi, Kimihiro Fukasawa | 2016-01-12 |
| 9103366 | Bolt-locking apparatus, mounting method thereof and mounting jig | Satoshi Kagatsume, Masahiko Satoh, Yukio Naito, Satoshi Muto, Tomohiro Nakata +2 more | 2015-08-11 |
| 9082593 | Electrode having gas discharge function and plasma processing apparatus | Daisuke Hayashi, Toshifumi Ishida | 2015-07-14 |
| 8597401 | Exhausting method and gas processing apparatus | Risako Miyoshi | 2013-12-03 |
| 8043659 | Substrate processing apparatus and substrate processing method | Eiji Takahashi | 2011-10-25 |
| 6986261 | Method and system for controlling chiller and semiconductor processing system | Norikazu Sasaki, Hiroshi Koizumi | 2006-01-17 |
| D494552 | Exhaust ring for manufacturing semiconductors | Kazuyuki Tezuka, Takashi Kitazawa, Hiroshi Koizumi | 2004-08-17 |