Issued Patents All Time
Showing 26–34 of 34 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8821644 | Bevel/backside polymer removing method and device, substrate processing apparatus and storage medium | Isamu Sakuragi, Akinori Kitamura, Tsutomu Hiroki | 2014-09-02 |
| 8523138 | Vacuum processing apparatus | — | 2013-09-03 |
| 8216382 | Foreign matter removal method and storage medium | — | 2012-07-10 |
| 8159653 | Substrate position detection apparatus, and method of adjusting a position of an imaging component of the same | — | 2012-04-17 |
| 8135486 | Substrate position determining method and substrate position detecting method | — | 2012-03-13 |
| 8113487 | Vacuum processing apparatus | — | 2012-02-14 |
| 7837425 | Transportation apparatus and drive mechanism | Hiroaki Saeki, Shigeru Ishizawa, Tsutomu Hiroki, Wataru Machiyama | 2010-11-23 |
| 7611124 | Vacuum processing apparatus | — | 2009-11-03 |
| D562524 | Wafer transfer apparatus | Tsutomu Hiroki, Wataru Machiyama | 2008-02-19 |