Issued Patents All Time
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9318359 | Apparatus for substrate treatment and heating apparatus | Il-Hwan Lim, Chul Soo Kim, Seung-Ae Choi | 2016-04-19 |
| 9117858 | Heater block and heat treatment apparatus having the same | Il-Hwan Lim, Chul Soo Kim, Seung-Ae Choi | 2015-08-25 |
| 8346068 | Substrate rotating and oscillating apparatus for rapid thermal process | Sang Seok Lee, Woon Ki Cho, Jun Her | 2013-01-01 |