Issued Patents All Time
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9318359 | Apparatus for substrate treatment and heating apparatus | Jang Woo Shim, Chul Soo Kim, Seung-Ae Choi | 2016-04-19 |
| 9117858 | Heater block and heat treatment apparatus having the same | Jang Woo Shim, Chul Soo Kim, Seung-Ae Choi | 2015-08-25 |