| 11850703 |
Method of forming retaining ring with shaped surface |
Hung Chih Chen, Steven M. Zuniga, Charles C. Garretson, Douglas R. McAllister, Jian Lin +12 more |
2023-12-26 |
| 11577361 |
Retaining ring with shaped surface and method of forming |
Hung Chih Chen, Steven M. Zuniga, Charles C. Garretson, Douglas R. McAllister, Jian Lin +12 more |
2023-02-14 |
| 11260500 |
Retaining ring with shaped surface |
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2022-03-01 |
| 10766117 |
Retaining ring with shaped surface |
Hung Chih Chen, Steven M. Zuniga, Charles C. Garretson, Douglas R. McAllister, Jian Lin +12 more |
2020-09-08 |
| 9937601 |
Retaining ring with Shaped Surface |
Hung Chih Chen, Steven M. Zuniga, Charles C. Garretson, Douglas R. McAllister, Jian Lin +12 more |
2018-04-10 |
| 9186773 |
Retaining ring with shaped surface |
Hung Chih Chen, Steven M. Zuniga, Charles C. Garretson, Douglas R. McAllister, Jian Lin +12 more |
2015-11-17 |
| 8585468 |
Retaining ring with shaped surface |
Hung Chih Chen, Steven M. Zuniga, Charles C. Garretson, Douglas R. McAllister, Jian Lin +12 more |
2013-11-19 |
| 8066551 |
Retaining ring with shaped surface |
Hung Chih Chen, Steven M. Zuniga, Charles C. Garretson, Douglas R. McAllister, Jian Lin +12 more |
2011-11-29 |
| 8008941 |
Polishing head testing with movable pedestal |
Jay Rohde, Stacy Meyer |
2011-08-30 |
| 7927190 |
Retaining ring with shaped surface |
Hung Chih Chen, Steven M. Zuniga, Charles C. Garretson, Douglas R. McAllister, Jian Lin +12 more |
2011-04-19 |
| 7750657 |
Polishing head testing with movable pedestal |
Jay Rohde, Stacy Meyer |
2010-07-06 |
| 7530153 |
Attaching components of a carrier head |
Trung T. Doan, Douglas R. McAllister, Stacy Meyer |
2009-05-12 |
| 5714036 |
Chlorine reduction module |
George Wong, Yan Rozenzon |
1998-02-03 |
