Issued Patents All Time
Showing 26–38 of 38 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8467896 | Feedback for polishing rate correction in chemical mechanical polishing | Jun Qian, Sivakumar Dhandapani, Jeffrey Drue David, Harry Q. Lee | 2013-06-18 |
| 8337279 | Closed-loop control for effective pad conditioning | Sivakumar Dhandapani, Stan Tsai, Daxin Mao, Sameer Deshpande, Shou-Sung Chang +4 more | 2012-12-25 |
| 8190285 | Feedback for polishing rate correction in chemical mechanical polishing | Jun Qian, Sivakumar Dhandapani, Jeffrey Drue David, Harry Q. Lee | 2012-05-29 |
| 8066551 | Retaining ring with shaped surface | Hung Chih Chen, Steven M. Zuniga, Douglas R. McAllister, Jian Lin, Stacy Meyer +12 more | 2011-11-29 |
| 7927190 | Retaining ring with shaped surface | Hung Chih Chen, Steven M. Zuniga, Douglas R. McAllister, Jian Lin, Stacy Meyer +12 more | 2011-04-19 |
| 7344434 | Retaining ring with shaped surface | Hung Chih Chen, Steven M. Zuniga, Douglas R. McAllister, Stacy Meyer, Trung T. Doan +5 more | 2008-03-18 |
| 7115024 | Profile control platen | Hung Chih Chen, Steven M. Zuniga, Thomas H. Osterheld, Sen-Hou Ko, Mohsen Salek | 2006-10-03 |
| 6913518 | Profile control platen | Hung Chih Chen, Steven M. Zuniga, Thomas H. Osterheld, Sen-Hou Ko, Mohsen Salek | 2005-07-05 |
| 6855031 | Slurry flow rate monitoring in chemical-mechanical polisher using pressure transducer | Boris Fuksshimov, Jeff P Rudd, Brian J. Brown | 2005-02-15 |
| 6855043 | Carrier head with a modified flexible membrane | Jianshe Tang, Brian J. Brown, Benjamin A. Bonner, Thomas H. Osterheld, Fred C. Redeker | 2005-02-15 |
| 6572446 | Chemical mechanical polishing pad conditioning element with discrete points and compliant membrane | Thomas H. Osterheld, Manoocher Birang, Robert D. Tolles, Steven M. Zuniga | 2003-06-03 |
| 6551176 | Pad conditioning disk | — | 2003-04-22 |
| 6220941 | Method of post CMP defect stability improvement | Boris Fishkin, Peter McKeever, Thomas H. Osterheld, Gopalakrishna B. Prabhu, Doyle E. Bennett +2 more | 2001-04-24 |