Patent Leaderboard
USPTO Patent Rankings Data through Dec 31, 2025
Home › Chemical mechanical polishing automated recipe generation

Chemical mechanical polishing automated recipe generation

US Patent 10256111 · Granted Apr 9, 2019

Estimated economic value: $19,096,000 ⓘ

Assignee

Inventors

View full patent text on Google Patents →

More Patents by These Inventors

Passive acoustic monitoring and acoustic sensors for chemical mechanical polishi2025
Determining substrate orientation with acoustic signals2025
Chemical mechanical polishing vibration measurement using optical sensor2025
Determining substrate precession with acoustic signals2025
Determining substrate precession with acoustic signals2025
Eddy current monitoring to detect vibration in polishing2025
Polishing apparatus using machine learning and compensation for pad thickness2025
Autonomous lane change method and apparatus, and storage medium2025
Generating synthetic training data including document images with key-value pair2025
Multi-stage machine learning model training for key-value extraction2025
Ultrathin atomic layer deposition film accuracy thickness control2025
Control of processing parameters for substrate polishing with substrate precessi2025