Issued Patents All Time
Showing 26–50 of 67 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9056383 | Path for probe of spectrographic metrology system | Jeffrey Drue David, Benjamin Cherian, Dominic J. Benvegnu, Boguslaw A. Swedek, Jun Qian +4 more | 2015-06-16 |
| 9017138 | Retaining ring monitoring and control of pressure | Hung Chih Chen, Charles C. Garretson, Jason Garcheung Fung | 2015-04-28 |
| 9005999 | Temperature control of chemical mechanical polishing | Kun Xu, Jimin Zhang, David H. Mai, Stephen Jew, Shih-Haur Shen +4 more | 2015-04-14 |
| 8992286 | Weighted regression of thickness maps from spectral data | Benjamin Cherian, Jeffrey Drue David, Boguslaw A. Swedek, Dominic J. Benvegnu, Jun Qian | 2015-03-31 |
| 8954186 | Selecting reference libraries for monitoring of multiple zones on a substrate | Jun Qian, Boguslaw A. Swedek, Harry Q. Lee, Jeffrey Drue David, Sivakumar Dhandapani | 2015-02-10 |
| 8771460 | Retaining ring for chemical mechanical polishing | Steven M. Zuniga | 2014-07-08 |
| 8562389 | Thin polishing pad with window and molding process | Dominic J. Benvegnu, Jimin Zhang, Boguslaw A. Swedek | 2013-10-22 |
| 8486220 | Method of assembly of retaining ring for CMP | Steven M. Zuniga | 2013-07-16 |
| 8470125 | Multilayer retaining ring for chemical mechanical polishing | Steven M. Zuniga | 2013-06-25 |
| 8408965 | Eddy current gain compensation | Doyle E. Bennett | 2013-04-02 |
| 8393933 | Polishing pad and system with window support | Jun Qian, Dominic J. Benvegnu, Ningzhuo Cui, Boguslaw A. Swedek | 2013-03-12 |
| 8292691 | Use of pad conditioning in temperature controlled CMP | Kun Xu, Jimin Zhang, Stephen Jew | 2012-10-23 |
| 8295967 | Endpoint control of multiple-wafer chemical mechanical polishing | Jimin Zhang, Ingemar Carlsson, Boguslaw A. Swedek, Stephen Jew | 2012-10-23 |
| 8029640 | Multilayer retaining ring for chemical mechanical polishing | Steven M. Zuniga | 2011-10-04 |
| 7815495 | Pad conditioner | Kun Xu, Jimin Zhang, James C. Wang, Yutao Ma, Steven M. Zuniga +1 more | 2010-10-19 |
| 7534364 | Methods for a multilayer retaining ring | Steven M. Zuniga | 2009-05-19 |
| 7520955 | Carrier head with a multilayer retaining ring for chemical mechanical polishing | Steven M. Zuniga | 2009-04-21 |
| 7201636 | Chemical mechanical polishing a substrate having a filler layer and a stop layer | Raymond R. Jin, Shijian Li, Fred C. Redeker | 2007-04-10 |
| 7115024 | Profile control platen | Hung Chih Chen, Steven M. Zuniga, Charles C. Garretson, Sen-Hou Ko, Mohsen Salek | 2006-10-03 |
| 7063597 | Polishing processes for shallow trench isolation substrates | Gopalakrishna B. Prabhu, Garlen C. Leung, Adam Zhong, Peter McReynolds, Yi Tao +3 more | 2006-06-20 |
| 6913518 | Profile control platen | Hung Chih Chen, Steven M. Zuniga, Charles C. Garretson, Sen-Hou Ko, Mohsen Salek | 2005-07-05 |
| 6863593 | Chemical mechanical polishing a substrate having a filler layer and a stop layer | Raymond R. Jin, Shijian Li, Fred C. Redeker | 2005-03-08 |
| 6855043 | Carrier head with a modified flexible membrane | Jianshe Tang, Brian J. Brown, Charles C. Garretson, Benjamin A. Bonner, Fred C. Redeker | 2005-02-15 |
| 6834777 | Closed loop control over delivery of liquid material to semiconductor processing tool | Benjamin A. Bonner, Michael W. Richter | 2004-12-28 |
| 6824455 | Polishing pad having a grooved pattern for use in a chemical mechanical polishing apparatus | Sen-Hou Ko | 2004-11-30 |