Issued Patents All Time
Showing 51–75 of 151 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10720349 | Temperature measurement in multi-zone heater | Dale R. Du Bois, Bozhi Yang, Jianhua Zhou, Sanjeev Baluja, Amit Kumar BANSAL | 2020-07-21 |
| 10711350 | Alumina layer formation on aluminum surface to protect aluminum parts | Ren-Guan Duan, Jianhua Zhou | 2020-07-14 |
| 10692703 | Ceramic heater with enhanced RF power delivery | Xing Lin, Jianhua Zhou, Ningli Liu | 2020-06-23 |
| 10669629 | Showerhead assembly with multiple fluid delivery zones | Amit Kumar BANSAL, Sanjeev Baluja, Sam Kim, Tuan Nguyen | 2020-06-02 |
| 10636684 | Loadlock integrated bevel etcher system | Saptarshi Basu, Jeongmin Lee, Paul Connors, Dale R. Du Bois, Prashant Kumar Kulshreshtha +12 more | 2020-04-28 |
| 10599043 | Critical methodology in vacuum chambers to determine gap and leveling between wafer and hardware components | Hiroyuki Ogiso, Jianhua Zhou, Zonghui SU, Jeongmin Lee, Karthik Thimmavajjula Narasimha +4 more | 2020-03-24 |
| 10580623 | Plasma processing using multiple radio frequency power feeds for improved uniformity | Zheng John Ye, Ganesh Balasubramanian, Thuy Britcher, Jay D. Pinson, II, Hiroji Hanawa +4 more | 2020-03-03 |
| 10570517 | Apparatus and method for UV treatment, chemical treatment, and deposition | Amit Kumar BANSAL, Dale R. Du Bois, Sanjeev Baluja, Scott A. Hendrickson, Thomas Nowak | 2020-02-25 |
| 10544508 | Controlling temperature in substrate processing systems | Amit Kumar BANSAL, Ganesh Balasubramanian, Jianhua Zhou, Ramprakash Sankarakrishnan | 2020-01-28 |
| 10518418 | Wafer swapper | Dale R. Du Bois, Karthik Janakiraman, Hari Ponnekanti, Sanjeev Baluja, Prajeeth Wilton | 2019-12-31 |
| 10497606 | Dual-zone heater for plasma processing | Xing Lin, Jianhua Zhou, Ramprakash Sankarakrishnan | 2019-12-03 |
| 10480077 | PEALD apparatus to enable rapid cycling | Dale R. Du Bois, Jianhua Zhou | 2019-11-19 |
| 10483141 | Semiconductor process equipment | Karthik Janakiraman, Hari Ponnekanti | 2019-11-19 |
| 10480074 | Apparatus for radical-based deposition of dielectric films | Jianhua Zhou, Yihong Chen, Abhijit Basu Mallick, Oscar Lopez, Ningli Liu | 2019-11-19 |
| 10460936 | Photo-assisted deposition of flowable films | Brian Saxton Underwood, Abhijit Basu Mallick, Mukund Srinivasan | 2019-10-29 |
| 10450653 | High impedance RF filter for heater with impedance tuning device | Jian J. Chen, Mohamad A. Ayoub, Zheng John Ye, Ramprakash Sankarakrishnan, Jianhua Zhou | 2019-10-22 |
| 10435786 | Alignment systems employing actuators providing relative displacement between lid assemblies of process chambers and substrates, and related methods | Danny D. WANG, Jun Tae Choi, Rupankar Choudhury, Zhong Qiang Hua, Jason Michael Lamb | 2019-10-08 |
| 10431480 | External substrate rotation in a semiconductor processing system | Tuan Nguyen, Amit Kumar BANSAL | 2019-10-01 |
| 10403515 | Loadlock integrated bevel etcher system | Saptarshi Basu, Jeongmin Lee, Paul Connors, Dale R. Du Bois, Prashant Kumar Kulshreshtha +12 more | 2019-09-03 |
| 10403535 | Method and apparatus of processing wafers with compressive or tensile stress at elevated temperatures in a plasma enhanced chemical vapor deposition system | Zheng John Ye, Jay D. Pinson, II, Hiroji Hanawa, Jianhua Zhou, Xing Lin +11 more | 2019-09-03 |
| 10388549 | On-board metrology (OBM) design and implication in process tool | Khokan Chandra Paul, Jay D. Pinson, II, Hari Ponnekanti, Rupankar Choudhury, Shekhar ATHANI +2 more | 2019-08-20 |
| 10385448 | Apparatus and method for purging gaseous compounds | Amit Kumar BANSAL, Ganesh Balasubramanian, Jianhua Zhou, Ramprakash Sankarakrishnan | 2019-08-20 |
| 10325800 | High temperature electrostatic chucking with dielectric constant engineered in-situ charge trap materials | Prashant Kumar Kulshreshtha, Kwangduk Douglas Lee, Bok Hoen Kim, Zheng John Ye, Swayambhu Prasad Behera +2 more | 2019-06-18 |
| 10325799 | Dual temperature heater | Dale R. Du Bois, Sanjeev Baluja, Ganesh Balasubramanian, Lipyeow Yap, Jianhua Zhou +1 more | 2019-06-18 |
| 10276353 | Dual-channel showerhead for formation of film stacks | Kaushik Alayavalli, Xinhai Han, Praket P. Jha, Masaki Ogata, Zhijun Jiang +6 more | 2019-04-30 |