Issued Patents All Time
Showing 26–50 of 151 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11532463 | Semiconductor processing chamber and methods for cleaning the same | Vishwas Kumar Pandey, Vinay Prabhakar, Bushra Afzal, Badri Narayan Ramamurthi | 2022-12-20 |
| 11530482 | Faceplate having a curved surface | Shailendra Srivastava, Sai Susmita Addepalli, Nikhil Sudhindrarao Jorapur, Daemian Raj Benjamin Raj, Amit Kumar BANSAL +5 more | 2022-12-20 |
| 11501993 | Semiconductor substrate supports with improved high temperature chucking | Jian Li, Zheng John Ye, Daemian Raj Benjamin Raj, Shailendra Srivastava, Xinhai Han +3 more | 2022-11-15 |
| 11492705 | Isolator apparatus and methods for substrate processing chambers | Nitin Pathak, Amit Kumar BANSAL, Tuan Nguyen, Thomas Rubio, Badri Narayan Ramamurthi | 2022-11-08 |
| 11456197 | Systems and methods for providing maintenance access to electronic device manufacturing tools | Michael R. Rice, Jeffrey C. Hudgens | 2022-09-27 |
| 11434568 | Heated ceramic faceplate | David H. Quach | 2022-09-06 |
| 11339475 | Film stack overlay improvement | Xinhai Han, Deenesh Padhi, Daemian Raj Benjamin Raj, Kristopher Enslow, Wenjiao Wang +8 more | 2022-05-24 |
| 11299805 | Plasma corrision resistive heater for high temperature processing | Abdul Aziz Khaja, Ren-Guan Duan, Amit Kumar BANSAL, Jianhua Zhou | 2022-04-12 |
| 11293099 | Showerhead assembly with multiple fluid delivery zones | Amit Kumar BANSAL, Sanjeev Baluja, Sam Kim, Tuan Nguyen | 2022-04-05 |
| 11276562 | Plasma processing using multiple radio frequency power feeds for improved uniformity | Zheng John Ye, Ganesh Balasubramanian, Thuy Britcher, Jay D. Pinson, II, Hiroji Hanawa +4 more | 2022-03-15 |
| 11270870 | Processing equipment component plating | Ren-Guan Duan, Bushra Afzal | 2022-03-08 |
| D938373 | Substrate transfer structure | Jason M. Schaller, Benjamin B. Riordon, Mitchell DiSanto, Paul Forderhase, Gary Wyka +7 more | 2021-12-14 |
| 11133210 | Dual temperature heater | Dale R. Du Bois, Sanjeev Baluja, Ganesh Balasubramanian, Lipyeow Yap, Jianhua Zhou +1 more | 2021-09-28 |
| 11031262 | Loadlock integrated bevel etcher system | Saptarshi Basu, Jeongmin Lee, Paul Connors, Dale R. Du Bois, Prashant Kumar Kulshreshtha +12 more | 2021-06-08 |
| 11004663 | Chamber design for semiconductor processing | Dale R. Du Bois, Amit Kumar BANSAL | 2021-05-11 |
| 10971389 | Multi-zone pedestal for plasma processing | Xing Lin, Bozhi Yang, Jianhua Zhou, Dale R. DuBois, Ramprakash Sankarakrishnan | 2021-04-06 |
| 10950477 | Ceramic heater and esc with enhanced wafer edge performance | Xing Lin, Jianhua Zhou, Zheng John Ye, Jian J. Chen | 2021-03-16 |
| 10916407 | Conditioning remote plasma source for enhanced performance having repeatable etch and deposition rates | Abdul Aziz Khaja, Mohamad A. Ayoub, Jay D. Pinson, II | 2021-02-09 |
| 10910227 | Bottom and side plasma tuning having closed loop control | Amit Kumar BANSAL, Ganesh Balasubramanian, Jianhua Zhou, Ramprakash Sankarakrishnan, Mohamad A. Ayoub +1 more | 2021-02-02 |
| 10910238 | Heater pedestal assembly for wide range temperature control | Kaushik Alayavalli, Ajit Balakrishna, Sanjeev Baluja, Amit Kumar BANSAL, Matthew J. Busche +3 more | 2021-02-02 |
| 10879041 | Method and apparatus of achieving high input impedance without using ferrite materials for RF filter applications in plasma chambers | Zheng John Ye, Abdul Aziz Khaja, Amit Kumar BANSAL, Kwangduk Douglas Lee, Xing Lin +2 more | 2020-12-29 |
| 10858735 | Alignment systems employing actuators providing relative displacement between lid assemblies of process chambers and substrates, and related methods | Danny D. WANG, Jason Michael Lamb, Jun Tae Choi, Rupankar Choudhury, Zhong Qiang Hua | 2020-12-08 |
| 10811301 | Dual-zone heater for plasma processing | Xing Lin, Jianhua Zhou, Ramprakash Sankarakrishnan | 2020-10-20 |
| 10793954 | PECVD process | Nagarajan Rajagopalan, Xinhai Han, Michael Wenyoung Tsiang, Masaki Ogata, Zhijun Jiang +17 more | 2020-10-06 |
| 10774423 | Tunable ground planes in plasma chambers | Karthik Janakiraman, Thomas Nowak, Mark Fodor, Dale R. Du Bois, Amit Kumar BANSAL +4 more | 2020-09-15 |