Issued Patents All Time
Showing 51–75 of 222 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11062887 | High temperature RF heater pedestals | Soonam Park, David Benjaminson, Xikun Wang | 2021-07-13 |
| 11049755 | Semiconductor substrate supports with embedded RF shield | David Benjaminson, Michael H. Grace, Soonam Park, Jaeyong Cho, Nikolai Kalnin +1 more | 2021-06-29 |
| 11049698 | Dual-channel showerhead with improved profile | — | 2021-06-29 |
| 11024486 | Semiconductor processing systems having multiple plasma configurations | Xinglong Chen, Shankar Venkataraman | 2021-06-01 |
| 11004661 | Process chamber for cyclic and selective material removal and etching | Toan Q. Tran, Soonam Park, Junghoon Kim | 2021-05-11 |
| 10964512 | Semiconductor processing chamber multistage mixing apparatus and methods | Mehmet Tugrul Samir, Dongqing Yang | 2021-03-30 |
| 10923367 | Process chamber for etching low K and other dielectric films | Srinivas D. Nemani, Ellie Yieh, Sergey G. Belostotskiy | 2021-02-16 |
| 10920320 | Plasma health determination in semiconductor substrate processing reactors | Junghoon Kim, Soonam Park, Tae Seung Cho, Nikolai Kalnin | 2021-02-16 |
| 10920319 | Ceramic showerheads with conductive electrodes | Laksheswar Kalita, Soonam Park, Tien Fak Tan, LokKee Loh, Saravjeet Singh +1 more | 2021-02-16 |
| 10903052 | Systems and methods for radial and azimuthal control of plasma uniformity | Satoru Kobayashi, Hideo Sugai, Nikolai Kalnin, Soonam Park, Toan Q. Tran | 2021-01-26 |
| 10829855 | Gas distribution showerhead for semiconductor processing | Anh N. Nguyen, Mehmet Tugrul Samir | 2020-11-10 |
| 10796922 | Systems and methods for internal surface conditioning assessment in plasma processing equipment | Soonam Park, Yufei Zhu, Edwin C. Suarez, Nitin K. Ingle, Jiayin Huang | 2020-10-06 |
| 10755900 | Multi-layer plasma erosion protection for chamber components | Toan Q. Tran, Laksheswar Kalita, Tae Won Kim, Xiaowei Wu, Xiao-Ming He +2 more | 2020-08-25 |
| 10707061 | Systems and methods for internal surface conditioning in plasma processing equipment | Soonam Park, Yufei Zhu, Edwin C. Suarez, Nitin K. Ingle, Jiayin Huang | 2020-07-07 |
| 10699879 | Two piece electrode assembly with gap for plasma control | Tien Fak Tan, Saravjeet Singh, Tae Wan Kim, Kenneth D. Schatz, Tae Seung Cho +1 more | 2020-06-30 |
| 10625277 | Showerhead having a detachable gas distribution plate | Vladimir Knyazik, Hamid Noorbakhsh, Jason C. Della Rosa, Zheng John Ye, Jennifer Y. Sun +1 more | 2020-04-21 |
| 10607867 | Bolted wafer chuck thermal management systems and methods for wafer processing systems | David Benjaminson, Ananda Seelavanth Math, Saravanakumar Natarajan, Shubham Chourey | 2020-03-31 |
| 10593560 | Magnetic induction plasma source for semiconductor processes and equipment | Tae Seung Cho, Soonwook Jung, Junghoon Kim, Satoru Kobayashi, Kenneth D. Schatz +1 more | 2020-03-17 |
| 10593523 | Systems and methods for internal surface conditioning in plasma processing equipment | Soonam Park, Yufei Zhu, Edwin C. Suarez, Nitin K. Ingle, Jiayin Huang | 2020-03-17 |
| 10577690 | Gas distribution showerhead for semiconductor processing | Anh N. Nguyen, Mehmet Tugrul Samir | 2020-03-03 |
| 10573496 | Direct outlet toroidal plasma source | — | 2020-02-25 |
| 10559451 | Apparatus with concentric pumping for multiple pressure regimes | Nikolai Kalnin, Toan Q. Tran | 2020-02-11 |
| 10551328 | Ceramic ring test device | Satoru Kobayashi, Yufei Zhu, Saurabh Garg, Soonam Park | 2020-02-04 |
| 10550472 | Flow control features of CVD chambers | Kien N. Chuc, Qiwei Liang, Hanh Nguyen, Xinglong Chen, Matthew L. Miller +5 more | 2020-02-04 |
| 10546729 | Dual-channel showerhead with improved profile | — | 2020-01-28 |