Issued Patents All Time
Showing 1–13 of 13 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11410860 | Process chamber for etching low k and other dielectric films | Dmitry Lubomirsky, Srinivas D. Nemani, Ellie Yieh | 2022-08-09 |
| 11302519 | Method of patterning a low-k dielectric film | Srinivas D. Nemani, Jeremiah T. Pender, Qingjun Zhou, Dmitry Lubomirsky | 2022-04-12 |
| 10923367 | Process chamber for etching low K and other dielectric films | Dmitry Lubomirsky, Srinivas D. Nemani, Ellie Yieh | 2021-02-16 |
| 10096496 | Process chamber for etching low K and other dielectric films | Dmitry Lubomirsky, Srinivas D. Nemani, Ellie Yieh | 2018-10-09 |
| 9666414 | Process chamber for etching low k and other dielectric films | Dmitry Lubomirsky, Srinivas D. Nemani, Ellie Yieh | 2017-05-30 |
| 9601301 | Non-intrusive measurement of a wafer DC self-bias in semiconductor processing equipment | Chinh Dinh, Andrew Nguyen, Michael G. Chafin | 2017-03-21 |
| 9368370 | Temperature ramping using gas distribution plate heat | Chinh Dinh, Qingjun Zhou, Srinivas D. Nemani, Andrew Nguyen | 2016-06-14 |
| 9165783 | Method of patterning a low-k dielectric film | Srinivas D. Nemani, Jeremiah T. Pender, Qingjun Zhou, Dmitry Lubomirsky | 2015-10-20 |
| 9093389 | Method of patterning a silicon nitride dielectric film | Srinivas D. Nemani, Jeremiah T. Pender, Qingjun Zhou, Dmitry Lubomirsky | 2015-07-28 |
| 8932959 | Method and system for etching plural layers on a workpiece including a lower layer containing an advanced memory material | Srinivas D. Nemani, Mang-Mang Ling, Jeremiah T. Pender, Kartik Ramaswamy, Andrew Nguyen +1 more | 2015-01-13 |
| 8802572 | Method of patterning a low-k dielectric film | Srinivas D. Nemani, Jeremiah T. Pender, Qingjun Zhou, Dmitry Lubomirsky | 2014-08-12 |
| 8748322 | Silicon oxide recess etch | Nancy Fung, David T. Or, Qingjun Zhou, Lina Zhu, Jeremiah T. Pender +3 more | 2014-06-10 |
| 8580693 | Temperature enhanced electrostatic chucking in plasma processing apparatus | Michael G. Chafin, Jingbao Liu, David Palagashvili | 2013-11-12 |