Issued Patents All Time
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9601301 | Non-intrusive measurement of a wafer DC self-bias in semiconductor processing equipment | Sergey G. Belostotskiy, Andrew Nguyen, Michael G. Chafin | 2017-03-21 |
| 9368370 | Temperature ramping using gas distribution plate heat | Sergey G. Belostotskiy, Qingjun Zhou, Srinivas D. Nemani, Andrew Nguyen | 2016-06-14 |
| 8748322 | Silicon oxide recess etch | Nancy Fung, David T. Or, Qingjun Zhou, Lina Zhu, Jeremiah T. Pender +3 more | 2014-06-10 |
| 8148977 | Apparatus for characterizing a magnetic field in a magnetically enhanced substrate processing system | Kartik Ramaswamy, Hiroji Hanawa, Lawrence Wong | 2012-04-03 |