Issued Patents All Time
Showing 26–34 of 34 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9728437 | High temperature chuck for plasma processing systems | Sultan Malik, Dmitry Lubomirsky, Shambhu N. Roy, Satoru Kobayashi, Tae Seung Cho +2 more | 2017-08-08 |
| 9132436 | Chemical control features in wafer process equipment | Qiwei Liang, Xinglong Chen, Kien N. Chuc, Dmitry Lubomirsky, Soonam Park +4 more | 2015-09-15 |
| 9018108 | Low shrinkage dielectric films | Sukwon Hong, Abhijit Basu Mallick, Jingmei Liang, Nitin K. Ingle | 2015-04-28 |
| 8894767 | Flow control features of CVD chambers | Kien N. Chuc, Qiwei Liang, Hanh Nguyen, Xinglong Chen, Matthew L. Miller +5 more | 2014-11-25 |
| 7989365 | Remote plasma source seasoning | Soonam Park, Soo Hyun Jeon, Jang-Gyoo Yang, Qiwei Liang, Dmitry Lubomirsky | 2011-08-02 |
| 7841582 | Variable seal pressure slit valve doors for semiconductor manufacturing equipment | Won Bae Bang, Yen-Kun Wang | 2010-11-30 |
| 7806383 | Slit valve | Dimitry Lubormirsky, Lun Tsuei, Won Bae Bang | 2010-10-05 |
| 7204888 | Lift pin assembly for substrate processing | Daniel S. Herkalo, Yen-Kun Wang, Jin Ho Lee, Dong-Hyung LEE, Jang Seok OH +1 more | 2007-04-17 |
| 6273140 | Cluster valve for semiconductor wafer processing systems | — | 2001-08-14 |